Semiconductor arrangements and methods for manufacturing the same

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专利名称 Semiconductor arrangements and methods for manufacturing the same 申请号 US201314761262 专利类型 US 公开(公告)号 US9461068(B2) 公开(授权)日 2016.10.04 申请(专利权)人 中国科学院微电子研究所 发明(设计)人 Zhu Huilong 主分类号 H01L29/78 IPC主分类号 H01L29/78;H01L27/12;H01L29/66;H01L29/06;H01L29/423;H01L29/165;H01L21/84 专利有效期 Semiconductor arrangements and methods for manufacturing the same 至Semiconductor arrangements and methods for manufacturing the same 法律状态 说明书摘要 Semiconductor arrangements and methods for manufacturing the same are provided. In one embodiment, the arrangement may include: a semiconductor on insulator (SOI) substrate, comprising a base substrate, a buried dielectric layer, and a SOI layer; a back gate formed on the SOI substrate and passing through the buried dielectric layer to be in electric contact with the base substrate; fins formed from the SOI layer on opposite sides of the back gate; and back gate dielectric layers interposed between the back gate and the respective fins.

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