Semiconductor devices and methods for manufacturing the same

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专利名称 Semiconductor devices and methods for manufacturing the same 申请号 US201314144275 专利类型 US 公开(公告)号 US9117926(B2) 公开(授权)日 2015.08.25 申请(专利权)人 中国科学院微电子研究所 发明(设计)人 Zhu Huilong;Liang Qingqing 主分类号 H01L21/8234 IPC主分类号 H01L21/8234;H01L27/088;H01L21/8238;H01L29/66 专利有效期 Semiconductor devices and methods for manufacturing the same 至Semiconductor devices and methods for manufacturing the same 法律状态 说明书摘要 A semiconductor device and a method of manufacturing the same is disclosed. In one aspect, the method comprises forming a first MOSFET having a first gate length in a semiconductor substrate, and forming a second MOSFET having a second gate length in the semiconductor substrate. Furthermore, the second gate length is less than the first gate length, and wherein the second MOSFET has a gate stack in the form of a spacer having a gate conductor and a gate dielectric isolating the gate conductor from the semiconductor substrate.

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