| 专利名称 | Laser micro/nano processing system and method | 申请号 | US201113824634 | 专利类型 | US | 公开（公告）号 | US9187318(B2) | 公开（授权）日 | 2015.11.17 | 申请（专利权）人 | 中国科学院理化技术研究所 | 发明（设计）人 | Duan Xuanming;Chen Shu;Cao Hongzhong;Dong Xianzi;Zhao Zhensheng | 主分类号 | H01L21/00 | IPC主分类号 | H01L21/00;B81C1/00;B23K26/06;B23K26/067;B23K26/08;H01L21/02;G03F7/20 | 专利有效期 | Laser micro/nano processing system and method 至Laser micro/nano processing system and method | 法律状态 | 说明书摘要 | A laser micro/nano processing system (100, 200, 300, 400) comprises: a laser light source used to provide a first laser beam having a first wavelength and a second laser beam having a second wavelength different from the first wavelength, with the pulse width of the first laser beam being in the range from a nanosecond to a femtosecond; an optical focusing assembly used to focus the first laser beam and the second laser beam to the same focal point; and a micro mobile platform (21) controlled by a computer. Also disclosed are a method for micro/nano-processing photosensitive materials with a laser and a method for fabricating a device with a micro/nano structure using laser two-photon direct writing technology. In the system and methods, spatial and temporal overlapping of two laser beams is utilized, so as to obtain a micro/nano structure with a processing resolution higher than that of a single laser beam, using an average power lower than that of a single laser beam. |
1、源头对接，价格透明
2、平台验证，实名审核
3、合同监控，代办手续
4、专员跟进，交易保障