| 专利名称 | DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING ELEMENT | 申请号 | EP20110838977 | 专利类型 | EP | 公开（公告）号 | EP2562526(B1) | 公开（授权）日 | 2016.10.19 | 申请（专利权）人 | 中国科学院上海光学精密机械研究所 | 发明（设计）人 | ZHU, JING;HUANG, HUIJIE;ZENG, AIJUN;HU, ZHONGHUA;YANG, BAOXI;CHEN, MING | 主分类号 | G03F7/20 | IPC主分类号 | G03F7/20;B23K26/70;G02B19/00 | 专利有效期 | DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING ELEMENT 至DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING ELEMENT | 法律状态 | 说明书摘要 | A detection apparatus and method for testing optical performance of beam shaping element used in ultraviolet lithography machine; The apparatus comprises visible wavelength laser and other optical units placed along the optical axis including, in order from laser side, (a) beam expander lens group, (b) beam splitter, (c) first far field imaging lens, (d) adjustable aperture or (e) CCD image sensor, (f) second far field imaging lens and (g) energy sensor. The detection apparatus is suitable be employed to detect the optical performance of beam shaping element working at any ultraviolet band, and provides the features of low cost, easy operation and quick measurement. |
1、源头对接，价格透明
2、平台验证，实名审核
3、合同监控，代办手续
4、专员跟进，交易保障