3D semiconductor memory device and manufacturing method thereof

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专利名称 3D semiconductor memory device and manufacturing method thereof 申请号 US201113376276 专利类型 US 公开(公告)号 US9000409(B2) 公开(授权)日 2015.04.07 申请(专利权)人 中国科学院微电子研究所 发明(设计)人 Huo Zongliang;Liu Ming 主分类号 H01L47/00 IPC主分类号 H01L47/00;H01L27/24;H01L45/00 专利有效期 3D semiconductor memory device and manufacturing method thereof 至3D semiconductor memory device and manufacturing method thereof 法律状态 说明书摘要 The present application discloses a 3D semiconductor memory device having 1T1R memory configuration based on a vertical-type gate-around transistor, and a manufacturing method thereof. A on/off current ratio can be well controlled by changing a width and a length of a channel of the gate-around transistor, so as to facilitate multi-state operation of the 1T1R memory cell. Moreover, the vertical transistor has a smaller layout size than a horizontal transistor, so as to reduce the layout size effectively. Thus, the 3D semiconductor memory device can be integrated into an array with a high density.

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