| 专利名称 | Heating method for maintaining a stable thermal budget | 申请号 | US201113379242 | 专利类型 | US | 公开（公告）号 | US8926321(B2) | 公开（授权）日 | 2015.01.06 | 申请（专利权）人 | 中国科学院微电子研究所 | 发明（设计）人 | Li Chunlong | 主分类号 | H01L21/30 | IPC主分类号 | H01L21/30;H01L21/28;H01L21/324 | 专利有效期 | Heating method for maintaining a stable thermal budget 至Heating method for maintaining a stable thermal budget | 法律状态 | 说明书摘要 | The present invention discloses a heating method for maintaining a stable thermal budget. By following the primary procedure with a virtual procedure in such a manner that the total duration of the whole heating process remains constant, it is beneficial to maintain a stable thermal budget and further to maintain a stable device performance. |
1、源头对接，价格透明
2、平台验证，实名审核
3、合同监控，代办手续
4、专员跟进，交易保障