Transistor, method for fabricating the transistor, and semiconductor device comprising the transistor

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专利名称 Transistor, method for fabricating the transistor, and semiconductor device comprising the transistor 申请号 US201113698276 专利类型 US 公开(公告)号 US8895403(B2) 公开(授权)日 2014.11.25 申请(专利权)人 中国科学院微电子研究所 发明(设计)人 Liang Qingqing;Zhong Huicai;Zhu Huilong 主分类号 H01L21/00 IPC主分类号 H01L21/00;H01L21/02;H01L27/088;H01L21/8238;H01L21/84;H01L27/12 专利有效期 Transistor, method for fabricating the transistor, and semiconductor device comprising the transistor 至Transistor, method for fabricating the transistor, and semiconductor device comprising the transistor 法律状态 说明书摘要 A transistor, a method for fabricating a transistor, and a semiconductor device comprising the transistor are disclosed in the present invention. The method for fabricating a transistor may comprise: providing a substrate and forming a first insulating layer on the substrate; defining a first device area on the first insulating layer; forming a spacer surrounding the first device area on the first insulating layer; defining a second device area on the first insulating layer, wherein the second device area is isolated from the first device area by the spacer; and forming transistor structures in the first and second device area, respectively. The method for fabricating a transistor of the present invention greatly reduces the space required for isolation, significantly decreases the process complexity, and greatly reduces fabricating cost.

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