| 专利名称 | Miniature thermoelectric energy harvester and fabrication method thereof | 申请号 | US201214110141 | 专利类型 | US | 公开（公告）号 | US8853814(B2) | 公开（授权）日 | 2014.10.07 | 申请（专利权）人 | 中国科学院上海微系统与信息技术研究所 | 发明（设计）人 | Xu Dehui;Xiong Bin;Wang Yuelin | 主分类号 | H01L35/10 | IPC主分类号 | H01L35/10;H01L35/32;H01L35/22;H01L35/34 | 专利有效期 | Miniature thermoelectric energy harvester and fabrication method thereof 至Miniature thermoelectric energy harvester and fabrication method thereof | 法律状态 | 说明书摘要 | A miniature thermoelectric energy harvester and a fabrication method thereof. Annular grooves are fabricated on a low-resistivity silicon substrate to define silicon thermoelectric columns, an insulating layer is fabricated on the annular grooves, a thermoelectric material is filled in the annular grooves to form annular thermoelectric columns, and then metal wirings, passivation layers and supporting substrates are fabricated, thereby completing the fabrication process. The silicon thermoelectric column using a silicon base material simplifies the fabrication process. The fabrication of the thermocouple structure is one thin-film deposition process, which simplifies the process. The use of silicon as a component of the thermocouple has a high Seebeck coefficient. The use of vertical thermocouples improves the stability. Since the thermocouple structure is bonded to the upper supporting substrate and lower supporting substrate by wafer-level bonding, the fabrication efficiency is improved. |
1、源头对接，价格透明
2、平台验证，实名审核
3、合同监控，代办手续
4、专员跟进，交易保障