Semiconductor device and manufacturing method thereof

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专利名称 Semiconductor device and manufacturing method thereof 申请号 US201113497249 专利类型 US 公开(公告)号 US8816326(B2) 公开(授权)日 2014.08.26 申请(专利权)人 中国科学院微电子研究所 发明(设计)人 Yin Huaxiang;Luo Jun;Zhao Chao;Liu Honggang;Chen Dapeng 主分类号 H01L29/78 IPC主分类号 H01L29/78;H01L29/66;H01L29/778;H01L29/08 专利有效期 Semiconductor device and manufacturing method thereof 至Semiconductor device and manufacturing method thereof 法律状态 说明书摘要 A semiconductor device, which comprises: a semiconductor substrate; a channel region on the semiconductor substrate, said channel region including a quantum well structure; a source region and a drain region on the sides of the channel region; a gate structure on the channel region; wherein the materials for the channel region, the source region and the drain region have different energy bands, and a tunneling barrier structure exists between the source region and the channel region.

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