Semiconductor structure and method for manufacturing the same

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专利名称 Semiconductor structure and method for manufacturing the same 申请号 US201113379357 专利类型 US 公开(公告)号 US8809955(B2) 公开(授权)日 2014.08.19 申请(专利权)人 中国科学院微电子研究所 发明(设计)人 Zhu Huilong;Wu Binneng;Xiao Weiping;Wu Hao;Liang Qingqing 主分类号 H01L29/786 IPC主分类号 H01L29/786;H01L21/8236;H01L29/10;H01L29/66 专利有效期 Semiconductor structure and method for manufacturing the same 至Semiconductor structure and method for manufacturing the same 法律状态 说明书摘要 Semiconductor structures and methods for manufacturing the same are disclosed. The semiconductor structure comprises: a gate stack formed on a semiconductor substrate; a super-steep retrograde island embedded in said semiconductor substrate and self-aligned with said gate stack; and a counter doped region embedded in said super-steep retrograde island, wherein said counter doped region has a doping type opposite to a doping type of said super-steep retrograde island. The semiconductor structures and the methods for manufacturing the same facilitate alleviating short channel effects.

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