| 专利名称 | Apparatus and method for detecting optical profile | 申请号 | US201113214645 | 专利类型 | US | 公开（公告）号 | US8842292(B2) | 公开（授权）日 | 2014.09.23 | 申请（专利权）人 | 中国科学院光电技术研究所 | 发明（设计）人 | Jia Xin;Xing Tingwen | 主分类号 | G01B11/02 | IPC主分类号 | G01B11/02;G01B11/30;G01B11/24;G01B9/02 | 专利有效期 | Apparatus and method for detecting optical profile 至Apparatus and method for detecting optical profile | 法律状态 | 说明书摘要 | Apparatus and methods for detecting optical profile are disclosed herein. In one embodiment, an apparatus includes a laser, a beam splitter, a collimation optical unit, first and second holders respectively holding a first test flat mirror and a second test flat mirror, a phase shifter connected with the first holder, and an angular measurement unit for measuring an angular error of the first test flat mirror and the second test flat mirror on the two holders. The first test flat mirror has a first test flat and the second test flat mirror has a second test flat. The apparatus further includes a planar imaging unit for generating the interfered test light having a direction generally along an x-axis direction of the first test flat and an x-axis direction of the second test flat and a convergence optical unit for projecting the interfered test light onto a detector. |
1、源头对接，价格透明
2、平台验证，实名审核
3、合同监控，代办手续
4、专员跟进，交易保障