Ring light source system for interferometer with adjustable ring radius and ring radial width

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专利名称 Ring light source system for interferometer with adjustable ring radius and ring radial width 申请号 US201213558572 专利类型 US 公开(公告)号 US8764241(B2) 公开(授权)日 2014.07.01 申请(专利权)人 中国科学院光电技术研究所 发明(设计)人 Xu Yan;Wan Yongjian;Wu Yongqian 主分类号 F21S8/00 IPC主分类号 F21S8/00 专利有效期 Ring light source system for interferometer with adjustable ring radius and ring radial width 至Ring light source system for interferometer with adjustable ring radius and ring radial width 法律状态 说明书摘要 A ring light source system for an interferometer with adjustable ring radius and ring radial width may comprise a laser light source, an expander and collimator optical system, an adjustable aperture, a binary phase grating, a variable-focus optical system, and a spatial filter. The expander and collimator optical system is configured to convert a light beam from the light source into a parallel light beam. The adjustable aperture is configured to adjust a diameter of the parallel light beam. The light beam with the diameter adjusted by the adjustable aperture is incident perpendicularly onto the binary phase grating, followed by the variable-focus optical system. The filter is positioned on a back focal plane of the variable-focus optical system, and is configured to receive a ring light source. The ring radius and radial width of the light source are adjustable by adjusting a focus length f1 of the variable-focus optical system.

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