Nanometer magnetic multilayer film for temperature sensor and manufacturing method therefor

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专利名称 Nanometer magnetic multilayer film for temperature sensor and manufacturing method therefor 申请号 US201615046911 专利类型 US 公开(公告)号 US9484527(B2) 公开(授权)日 2016.11.01 申请(专利权)人 中国科学院物理研究所 发明(设计)人 Han Xiufeng;Yuan Zhonghui;Liu Pan;Yu Guoqiang;Feng Jiafeng;Zhang Dianlin 主分类号 H01L43/08 IPC主分类号 H01L43/08;H01L43/12;G01K7/36;H01F10/32;G01K7/38;H01L43/02 专利有效期 Nanometer magnetic multilayer film for temperature sensor and manufacturing method therefor 至Nanometer magnetic multilayer film for temperature sensor and manufacturing method therefor 法律状态 说明书摘要 A magnetic multilayer film for a temperature sensor is disclosed. The magnetic multilayer film comprises: a bottom magnetic composite layer provided on a substrate, the bottom magnetic composite layer having a direct pinning structure, an indirect pinning structure, a synthetic ferromagnetic structure, or a synthetic anti-ferromagnetic structure; a spacer layer provided on the bottom magnetic composite layer; and a top magnetic composite layer provided on the spacer layer, the top magnetic composite layer having the direct pinning structure, the indirect pinning structure, the synthetic ferromagnetic structure, or the synthetic anti-ferromagnetic structure, wherein a ferromagnetic layer of the bottom magnetic composite layer closest to the spacer layer has a magnetic moment anti-parallel with that of a ferromagnetic layer of the top magnetic composite layer closest to the spacer layer.

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